---
title: "The first domestically produced commercial electron beam lithography machine in the country has been \"produced\" in Hangzhou"
type: "News"
locale: "en"
url: "https://longbridge.com/en/news/252945271.md"
description: "The first domestically produced commercial electron beam lithography machine \"Xizhi\" has completed application testing in Hangzhou, with precision comparable to international mainstream equipment, marking a new stage in quantum chip research and development. This device was independently developed by the Zhejiang University Yuhang Quantum Research Institute and has the capability for fine engraving at the micron level, and it has officially entered the market"
datetime: "2025-08-14T01:19:35.000Z"
locales:
  - [zh-CN](https://longbridge.com/zh-CN/news/252945271.md)
  - [en](https://longbridge.com/en/news/252945271.md)
  - [zh-HK](https://longbridge.com/zh-HK/news/252945271.md)
generator: "portal-rs"
---

# The first domestically produced commercial electron beam lithography machine in the country has been "produced" in Hangzhou

According to Hangzhou Daily, recently, as one of the first batch of signed incubation projects at the base, the first domestically produced commercial electron beam lithography machine "Xizhi" has entered application testing, with precision comparable to international mainstream equipment, marking the arrival of a "Chinese knife" for quantum chip research and development. At the testing site, the relevant team from Zhejiang University's Yuhang Quantum Research Institute was busy, with a machine resembling a large steel cabinet undergoing application tests, and real-time parameters continuously flashing on the electronic display. "This is not an ordinary machine, but a 'nano magic pen' that can carve an entire city map on a hair strand!" the team leader told reporters. Relying on the provincial key laboratory, this new generation 100kV electron beam lithography machine "Xizhi," independently developed by the research institute, has officially entered the market

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> **Disclaimer: This article is for reference only and does not constitute any investment advice.**