---
title: "Xanadu, ASML collaborate on advanced lithography for photonic quantum chips"
type: "News"
locale: "en"
url: "https://longbridge.com/en/news/298445790.md"
description: "Xanadu Quantum Technologies and ASML have announced a collaboration to develop advanced lithography processes for photonic quantum computing chips. The partnership aims to reduce optical losses by improving patterning control and minimizing line edge roughness. This initiative seeks to accelerate the development of fault-tolerant, error-corrected photonic quantum hardware for utility-scale computing while allowing ASML to deepen its insights into applying advanced lithography innovations to next-generation photonics manufacturing."
datetime: "2026-09-09T11:06:16.000Z"
locales:
  - [zh-CN](https://longbridge.com/zh-CN/news/298445790.md)
  - [en](https://longbridge.com/en/news/298445790.md)
  - [zh-HK](https://longbridge.com/zh-HK/news/298445790.md)
generator: "portal-rs"
---

# Xanadu, ASML collaborate on advanced lithography for photonic quantum chips

-   Xanadu Quantum Technologies entered a collaboration with ASML to develop advanced lithography processes for photonic quantum computing chips. \* Work targets lower optical losses by improving patterning control, with a focus on reducing line edge roughness that can drive losses. \* Partnership aims to accelerate progress toward fault-tolerant, error-corrected photonic quantum hardware for utility-scale quantum computing. \* ASML will use the project to deepen insight into applying advanced lithography innovations to next-generation photonics manufacturing. Disclaimer: This news brief was created by Public Technologies (PUBT) using generative artificial intelligence. While PUBT strives to provide accurate and timely information, this AI-generated content is for informational purposes only and should not be interpreted as financial, investment, or legal advice. Xanadu Quantum Technologies Ltd. published the original content used to generate this news brief via GlobeNewswire (Ref. ID: 202609090700PRIMZONECNPR\_\_\_\_9823326) on September 09, 2026, and is solely responsible for the information contained therein. © Copyright 2026 - Public Technologies (PUBT)

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> **Disclaimer: This article is for reference only and does not constitute any investment advice.**