Tokyo Electron Unveils EVAROS Batch Thermal Processing System for 300 mm Wafers
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Tokyo Electron Ltd. has launched EVAROS™, a new batch thermal processing system for 300 mm wafers, enhancing productivity and environmental performance. The system can process up to 200 wafers simultaneously, reducing CO2 emissions by 25% compared to TELINDY PLUS™. It features a multi-zone control heater and large-diameter exhaust ducts for advanced semiconductor manufacturing. This announcement was made on December 15, 2025.
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