Onto Innovation buys 27% stake in Rigaku for about USD 720 million

Onto Innovation has completed the acquisition of a 27% minority stake in Rigaku from Atom Investment for approximately USD 720 million (JPY 113 billion). This investment strengthens their partnership to advance X-ray technologies for semiconductor process control. Onto will not consolidate Rigaku's results but will nominate one board director.

Onto Innovation closed its acquisition of a 27% minority stake in Rigaku from Atom Investment, an affiliate of Carlyle. * Deal value: JPY 113,078,356,600, about USD 720 million. * Investment deepens a partnership announced in April 2026 to advance X-ray technologies for semiconductor process control. * Onto will use the fair value option method, will not consolidate Rigaku results, will nominate one Rigaku board director. Disclaimer: This news brief was created by Public Technologies (PUBT) using generative artificial intelligence. While PUBT strives to provide accurate and timely information, this AI-generated content is for informational purposes only and should not be interpreted as financial, investment, or legal advice. Onto Innovation Inc. published the original content used to generate this news brief via Business Wire (Ref. ID: 20260806749283) on August 10, 2026, and is solely responsible for the information contained therein. © Copyright 2026 - Public Technologies (PUBT)