Semiconductor equipment is the most upstream segment of the chip manufacturing industry chain, often referred to as the "mother machine" of chip production. In the investment of a wafer production line, equipment expenses typically account for 70-80%.

From wafer cleaning, lithography, etching, thin film deposition to ion implantation, and metrology inspection, each process step is supported by a dedicated type of equipment. The technological level of the equipment directly determines the nanometer node a wafer fab can achieve.

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