ASML, AMAT, Lam and KLA are all engaged in Terafab project. SpaceX will spend $3B+ on pilot line and $16.8B on 1st Phase high volume fab. KLA could play a critical role in Terafab's early ramp (inspection and metrology tools) to tackle process defects and accelerate yield learning.
Source: Sravan Kundojjala
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